HYDROFLUORIC ACID
SYNONYMS:
ANHYDROUS
HYDROGEN FLUORIDE; ANHYDROFLUORIC ACID; AQUEOUS HYDROGENFLUORIDE; BOE
(BUFFERED OXIDE ETCH); C-P 8 SOLUTION; DOPED POLY ETCH; EEC No. 009-002-00-6;
231-634-8; FLUORURO de HIDROGENO (Spanish); FLUSSAEURE (German); FLUSSYRE
(French); FRECKLE ETCH; HYDROFLUORIDE; HF-A; HYDROGENFLUORIDE; IMPLANTER
FUMER; KTI BUFFERED OXIDE ETCH 6:1; KTI BUFFERED OXIDE ETCH 50:1; KTI OXIDE
ETCH 5:1; KTI OXIDE ETCH 10:1; KTI OXIDE ETCH 50:1; MAE ETCHANTS; MIXED ACID
ETCH; POLY ETCH 95%; RDX-221 ALUMETCH LK; RUBIGINE; SILICON ETCH SOLUTION;
WRIGHT ETCH
IDENTIFICATION:
CAS:
7664-39-3
DOT ID:
UN1052
(anhydrous); UN1790 (solution, with > 60 % strength)
Hazard Class or Division:
8 (CORROSIVE MATERIAL) ; s u b s i d i a r y
r i s k: 6. 1 (POISONOUS/TOXIC MATERIALS)
ERG Guide:
125
(UN1052); 157 (UN1790)
Formula:
HF
RTECS No:
MW7875000
Properties:
Nonflammable
gas or fuming watery liquid (below 67°F/19°C). Colorless to green; weak
solutions have appearance of water. Shipped as a 40 to 70% solution of hydrogenfluoride in water. Sharp, irritating odor. Sinks and mixes with water, with
release of heat and toxic hydrofluoric acid and heat. The pure compound is a
crystalline solid below 12°F (
!
11°C). Often used in aqueous solution. Gas is
slightly lighter than air.
Uses:
Electropolishing;
in pickling baths for metals such as stainless steel, etching.
HEALTH & SAFETY INFORMATION
• IDLH:
30
ppm as hydrogenfluoride
• Odor threshold:
0.04 ppm as HF. Disagreeable, pungent odor at <1
ppm/irritation of eyes and throat at 3 ppm.
•
OSHA Table Z-1 and Z-2 Air Contaminant
•
OSHA Process Safety Management of Highly Hazardous Chemicals (29 CFR1910.119,
Appendix A), Threshold Quantity: 1000 pounds as hydrofluoric acid, anhydrous or
hydrogenfluoride.
• NIOSH Criteria Document
: NIOSH 76-143
•
Vapor and liquid are extremely corrosive to, eyes, skin, and respiratory tract.
Exposure may cause lung edema; the effects may be delayed. Extremely corrosive
if swallowed. Long term hydrogenfluoride exposure has been reported to damage
the kidneys and liver. Fluorine and hydrogenfluoride are very irritating to
the skin, eyes, and respiratory tract. At high levels, hydrogenfluoride can
also damage the heart. In adults, high fluoride exposure over a long time can
lead to skeletal fluorosis with denser bones, joint pain, and a limited range
of joint movement. Although fluoride exposure results in denser bones, the bone
appears to be weaker than normal bone and there may be a greater risk of
breaking the bone.
Animal
studies:
In animals,
exposure to high doses of fluoride can result in decreased fertility and sperm
and testes damage.
Exposure Limits:
•
ACGIH TLV: 3 ppm/2.5 mg[F]/m3 TWA; BEI: 3 mg[F]/g creatinine in urine
prior
to end of shift; 10 mg[F]/g creatinine in
urine end of shift
•
OSHA PEL: 3 ppm/2.5 mg[F]/m3 TWA
•
NIOSH REL: 3 ppm/2.5 mg[F]/m3 TWA; 6 ppm/5 mg[F]/m3, 15 min. ceiling limit
•
DFG MAK: 2.5 mg[F]/m3; BAT: 7.0 mg[F]/g creatinine in urine at end of shift;
4.0 mg[F]/g creatinine in urine at the beginning of the next shift.
Respirator:
30
ppm:
CCRS [any chemical
cartridge respirator with cartridge(s) providing protection against the
compound of concern] PAPRS [any powered, airpurifying respirator with
cartridge(s) providing protection against the compound of concern] GMFS [any
air-purifying, full-facepiece respirator (gas mask) with a chin-style, front-
or back-mounted canister providing protection against the compound of concern]
SA (any supplied-air respirator) SCBA (any selfcontained breathing apparatus).
Emergency or Planned Entry into
Unknown Concentrations or IDLH Conditions
SCBAF:PD,PP (any self-contained breathing apparatus that has a
full facepiece and is operated in a pressure-demand or other positivepressure
mode) SAF:PD,PP:ASCBA (any suppliedair respirator that has a full facepiece and
is operated in a pressure-demand or other positive-pressure mode in combination
with an auxiliary self-contained breathing apparatus operated in a
pressure-demand or other positive-pressure mode).
Escape:
GMFS
[any airpurifying, full-facepiece respirator (gas mask) with a chin-style,
front- or back-mounted canister providing protection against the compound of
concern] SCBAE (any appropriate escape-type, self-contained breathing
apparatus).
Note:
Substance reported to cause eye irritation or
damage; may require eye protection.
Reactivity:
A
strong acid. Reacts–possibly with violence–with acetic anhydride, aliphatic
amines, alcohols, alkanolamines, alkylene oxides, aromatic amines, amides,
2-aminoethanol, ammonia, ammonium hydroxide, arsenic trioxide, bismuthic acid,
calcium oxide, ethylene diamine, ethyleneimine, epichlorohydrin, isocyanates,
metal acetylides, nitrogen trifluoride, oleum, organic anhydrides, oxygen
difluoride, phosphorus pentoxide, sulfuric acid, sodium hydroxide and other
bases, strong oxidizers, vinyl acetate, and vinylidene fluoride. Attacks glass,
concrete, ceramics, some metals (forming flammablehydrogen gas), some
plastics, rubber, and coatings.
FIRE INFORMATION:
If material or contaminated runoff enters waterways, notify
downstream users of potentially contaminated water.
Hazard Classifications:
Health Hazard (Blue)
. . . . . . . . . . . . . . 4
Flammability (Red)
. . . . . . . . . . . . . . . 0
Reactivity (Yellow)
. . . . . . . . . . . . . . . . 0
FIRST AID:
GASES
- CORROSIVE (125)
: Move
victim to fresh air. Call emergency medical care. Apply artificial respiration
if victim is not breathing. Do not use mouth-to-mouth method if victim ingested
or inhaled the substance; induce artificial respiration with the aid of a
pocket mask equipped with a one-way valve or other proper respiratory medical
device. Administer oxygen if breathing is difficult. Remove and isolate
contaminated clothing and shoes. In case of contact with liquefied gas, thaw
frosted parts with lukewarm water. In case of contact with substance,
immediately flush skin or eyes with running water for at least 20 minutes. Keep
victim warm and quiet. Keep victim under observation. Effects of contact or
inhalation may be delayed. Ensure that medical personnel are aware of the material(s)
involved, and take precautions to protect themselves.
T O X I C a n d / o r C O R R O S I
V E (NONCOMBUSTIBLE/WATER SENSITIVE) (157)
: Move victim to fresh air. Call emergency medical care. Apply
artificial respiration if victim is not breathing. Do not use mouth-to-mouth
method if victim ingested or inhaled the substance; induce artificial
respiration with the aid of a pocket mask equipped with a one-way valve or
other proper respiratory medical device. Administer oxygen if breathing is
difficult. Remove and isolate contaminated clothing and shoes. In case of
contact with substance, immediately flush skin or eyes with running water for
at least 20 minutes. For minor skin contact, avoid spreading material on
unaffected skin. Keep victim warm and quiet. Effects of exposure (inhalation,
ingestion, or skin contact) may be delayed. Ensure that medical personnel are
aware of the material(s) involved, and take precautions to protect themselves.
ENVIRONMENTAL REGULATIONS
•
Clean Air Act: Hazardous Air Pollutants (Title I, Part A, Section 112).
•
Clean Water Act: Section 311 Hazardous Substances/RQ (same as CERCLA); Section
313 Priority Chemicals.
•
EPA Hazardous Waste Number (RCRA No.): U134.
•
EPCRA Section 302 Extremely Hazardous Substances: TPQ = 100 lb (45.4 kg).
•
EPCRA Section 304: Reportable Quantity (RQ): CERCLA, 100 lb (45.4 kg).
•
EPCRA Section 313: Form R
de
minimis
concentration
reporting level: 1.0%.
•
EPA Best Practical Control Technology Limits for Metal Finishing Effluent: pH,
Maximum 1 day: 6.0–9.5; Daily average/30 consecutive days: 6.0–9.5
•
California LOL: DEGIJLMNOQR
•
WHMIS, Ingredients Disclosure List (Canada): 1%